INTRINSIC GETTERING IN OXYGEN-FREE SILICON

被引：11
|
作者：
NAUKA, N
LAGOWSKI, J
GATOS, HC
LI, CJ
机构：
来源：
APPLIED PHYSICS LETTERS | 1985年 / 46卷 / 07期
关键词：
D O I：
10.1063/1.95525
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：673 / 675
页数：3
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