X-RAY-DIFFRACTION OF MULTILAYERS WITH A SYSTEMATIC DEVIATION OF PERIOD

被引：6
|
作者：
GAO, C
JIANG, ZM
WU, ZG
机构：
[1] Fundamental Physics Center, University of Science and Technology of China, Hefei
来源：
JOURNAL OF APPLIED PHYSICS | 1990年 / 68卷 / 02期
关键词：
D O I：
10.1063/1.346774
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
The x-ray diffraction profile of multilayers with systematic deviation of period has been studied and simulated on computer. The peak shift, asymmetric peak shape, and decrease of peak intensity can be predicted. The influence is much more severe than that of random fluctuation of period.
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页码：874 / 875
页数：2
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