THIN-PHASE EPITAXY FOR GOOD SEMICONDUCTOR METAL OHMIC CONTACTS

被引:31
作者
SEBESTYEN, T
HARTNAGEL, HL
HERRON, LH
机构
[1] UNIV NEWCASTLE TYNE,MERZ,COURT,NEWCASTLE TYNE NE1 7RU,ENGLAND
[2] UNIV NEWCASTLE TYNE,DEPT ELECT & ELECTR ENGN,MERZ COURT,NEWCASTLE TYNE NE1 7RU,ENGLAND
关键词
D O I
10.1109/T-ED.1975.18327
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:1073 / 1077
页数:5
相关论文
共 19 条
[1]  
[Anonymous], 1971, SEMICONDUCT SEMIMET
[2]   EFFECTIVE DISTRIBUTION COEFFICIENTS OF SOME GROUP-VI ELEMENTS IN INDIUM-PHOSPHIDE GROWN BY LIQUID-PHASE EPITAXY [J].
BROWN, KE .
SOLID-STATE ELECTRONICS, 1974, 17 (05) :505-507
[3]  
Casey H.C., 1973, ATOMIC DIFFUSION SEM, P351
[4]   SPECIFIC CONTACT RESISTANCE OF OHMIC CONTACTS TO GALLIUM-ARSENIDE [J].
EDWARDS, WD ;
TORRENS, AB ;
HARTMAN, WA .
SOLID-STATE ELECTRONICS, 1972, 15 (04) :387-&
[5]   ALLOYING BEHAVIOR OF AU AND AU-GE ON GAAS [J].
GYULAI, J ;
MAYER, JW ;
RODRIGUEZ, V ;
YU, AYC ;
GOPEN, HJ .
JOURNAL OF APPLIED PHYSICS, 1971, 42 (09) :3578-+
[6]  
HANSEN M, 1960, CONSTITUTION BINARY
[7]   VERY LOW RESISTANCE NI-AUGE-NI CONTACTS TO N-GAAS [J].
HEIME, K ;
KONIG, U ;
KOHN, E ;
WORTMANN, A .
SOLID-STATE ELECTRONICS, 1974, 17 (08) :835-&
[8]   LUMINESCENCE DUE TO GE ACCEPTORS IN GAAS [J].
KRESSEL, H ;
HAWRYLO, FZ ;
LEFUR, P .
JOURNAL OF APPLIED PHYSICS, 1968, 39 (09) :4059-+
[9]  
MIGITAKA M, 1972, P S GAAS I PHYS C SE, P249
[10]  
MILNES AG, 1972, HETEROJUNCTIONS META, P293