AN EXPERIMENTAL-STUDY OF A PARALLEL-PLATE RADIO-FREQUENCY DISCHARGE - MEASUREMENTS OF THE RADIATION TEMPERATURE AND ELECTRON-DENSITY

被引：44

作者：

HEBNER, GA ^{[1
]}

VERDEYEN, JT ^{[1
]}

KUSHNER, MJ ^{[1
]}

机构：

[1] UNIV ILLINOIS,GASEOUS ELECTR LAB,CHAMPAIGN,IL 61820

来源：

JOURNAL OF APPLIED PHYSICS | 1988年 / 63卷 / 07期

关键词：

D O I：

10.1063/1.341060

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2226 / 2236

页数：11

共 32 条

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