ANALYSIS OF SB-IMPLANTED SILICON BY (P P) SCATTERING AND HALL MEASUREMENTS

被引:27
作者
ERIKSSON, L
DAVIES, JA
DENHARTOG, J
MAYER, JW
MARSH, OJ
MARKARIOUS, R
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D O I
10.1063/1.1754830
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O59 [应用物理学];
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页码:323 / +
页数:1
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