GRAPHOEPITAXY OF YBA2CU3O7 THIN-FILMS

被引:7
作者
DOZIER, WD [1 ]
PLATT, CE [1 ]
机构
[1] TRW SPACE & TECHNOL GRP,REDONDO BEACH,CA 90278
关键词
D O I
10.1063/1.109475
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report on the graphoepitaxial growth of YBa2Cu3O7 (YBCO) thin films on LaAlO3 (LAO) substrates textured with submicron features. This is the first use of a substrate microstructure to template and control the morphology of a thin film. Two-dimensional close-packed crystalline monolayers of polystyrene spheres 482 nm in diameter are used as lithographic masks for the ion milling of arrays of conical posts in the substrates. This regular pattern is reflected in the growth of the YBCO film which is at once epitaxial to the substrate and disrupted on the same length scale as the substrate texture. The YBCO thin films are structurally and electrically of the same quality as films deposited on untreated substrates.
引用
收藏
页码:2048 / 2050
页数:3
相关论文
共 6 条
[1]   APPLICATIONS OF SURFACE TEXTURES PRODUCED WITH NATURAL LITHOGRAPHY [J].
DECKMAN, HW ;
DUNSMUIR, JH .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1983, 1 (04) :1109-1112
[2]   NATURAL LITHOGRAPHY [J].
DECKMAN, HW ;
DUNSMUIR, JH .
APPLIED PHYSICS LETTERS, 1982, 41 (04) :377-379
[3]   FABRICATION OF HIGH-TC JOSEPHSON EFFECT DEVICES BY NATURAL LITHOGRAPHY [J].
DOZIER, WD ;
DALY, KP ;
HU, R ;
PLATT, CE ;
WIRE, MS .
IEEE TRANSACTIONS ON MAGNETICS, 1991, 27 (02) :3223-3226
[4]   ALIGNMENT OF LIQUID-CRYSTALS USING SUBMICROMETER PERIODICITY GRATINGS [J].
FLANDERS, DC ;
SHAVER, DC ;
SMITH, HI .
APPLIED PHYSICS LETTERS, 1978, 32 (10) :597-598
[5]   CRYSTALLOGRAPHIC ORIENTATION OF SILICON ON AN AMORPHOUS SUBSTRATE USING AN ARTIFICIAL SURFACE-RELIEF GRATING AND LASER CRYSTALLIZATION [J].
GEIS, MW ;
FLANDERS, DC ;
SMITH, HI .
APPLIED PHYSICS LETTERS, 1979, 35 (01) :71-74
[6]  
SMITH HI, 1978, APPL PHYS LETT, V32, P349, DOI 10.1063/1.90054