STUDIES ON ZNO/P-SI HETEROJUNCTIONS FABRICATED BY A MODIFIED CVD METHOD

被引：11

作者：

BASU, S

DUTTA, A

机构：

[1] Semiconductor Materials Preparation and Processing Laboratory, Indian Institute of Technology, Materials Science Centre, Kharagpur

来源：

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1993年 / 136卷 / 01期

关键词：

D O I：

10.1002/pssa.2211360134

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Thin film ZnO (almost-equal-to 0.7 mum) is deposited on quartz and p-Si substrates by a modified CVD method. The optical and electrical properties of the film are studied. The ZnO/p-Si heterojunction is characterized by current-voltage and capacitance-voltage measurements using indium ohmic contacts to zinc oxide. The conduction band and valence band discontinuity values are calculated and a suitable band energy diagram of the heterojunction is constructed.

引用

页码：267 / 272

页数：6

共 14 条

[1] PHOTO-VOLTAIC PROPERTIES OF ZNO-CDTE HETEROJUNCTIONS PREPARED BY SPRAY PYROLYSIS [J].

ARANOVICH, JA ;

GOLMAYO, D ;

FAHRENBRUCH, AL ;

BUBE, RH .

JOURNAL OF APPLIED PHYSICS, 1980, 51 (08) :4260-4268

[2] RF PLANAR MAGNETRON SPUTTERED ZNO FILMS .2. ELECTRICAL-PROPERTIES [J].

BLOM, FR ;

VANDEPOL, FCM ;

BAUHUIS, G ;

POPMA, TJA .

THIN SOLID FILMS, 1991, 204 (02) :365-376

[3] DEPOSITION AND CHARACTERIZATION OF ZINC-OXIDE THIN-FILMS FOR HYDROGEN SENSOR DEVICES [J].

DUTTA, A ;

CHAUDHURI, TK ;

BASU, S .

MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1992, 14 (01) :31-35

[4]

FORREST SR, 1987, HETEROJUNCTION BAND, P315

[5]

GHOSE A, 1991, MATER CHEM PHYS, V17, P45

[6] HYDROGEN-SENSITIVE SCHOTTKY-BARRIER DIODES [J].

ITO, K .

SURFACE SCIENCE, 1979, 86 (JUL) :345-352

[7] ADMITTANCE SPECTROSCOPY OF ZNO CRYSTALS [J].

KANAI, Y .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1990, 29 (08) :1426-1430

[8]

KROEGER FA, 1964, CHEM IMPERFECT CRYST, P743

[9] THICK-FILM ZNO RESISTIVE GAS SENSORS - ANALYSIS OF THEIR KINETIC-BEHAVIOR [J].

PIZZINI, S ;

BUTTA, N ;

NARDUCCI, D ;

PALLADINO, M .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1989, 136 (07) :1945-1948

[10]

SARKAR A, 1991, THIN SOLID FILMS, V204, P349

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