TRIBOLOGICAL AND ELECTRICAL-PROPERTIES OF METAL-CONTAINING HYDROGENATED CARBON-FILMS

被引：241

作者：

DIMIGEN, H

HUBSCH, H

MEMMING, R

机构：

来源：

APPLIED PHYSICS LETTERS | 1987年 / 50卷 / 16期

关键词：

D O I：

10.1063/1.97968

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

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页码：1056 / 1058

页数：3

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