TRIBOLOGICAL AND ELECTRICAL-PROPERTIES OF METAL-CONTAINING HYDROGENATED CARBON-FILMS

被引：241

作者：

DIMIGEN, H

HUBSCH, H

MEMMING, R

机构：

来源：

APPLIED PHYSICS LETTERS | 1987年 / 50卷 / 16期

关键词：

D O I：

10.1063/1.97968

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：1056 / 1058

页数：3

相关论文

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[2] DISCHLER B, 1985, 7TH P INT S PLASM CH, V1, P1
[3] ENKE K, 1980, APPL PHYS LETT, V36, P281
[4] PROPERTIES OF POLYMERIC LAYERS OF HYDROGENATED AMORPHOUS-CARBON PRODUCED BY A PLASMA-ACTIVATED CHEMICAL VAPOR-DEPOSITION PROCESS .2. TRIBOLOGICAL AND MECHANICAL-PROPERTIES
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[J]. THIN SOLID FILMS, 1986, 143 (01) : 31 - 41
[5] PROPERTIES OF POLYMERIC LAYERS OF AMORPHOUS HYDROGENATED CARBON PRODUCED BY A PLASMA-ACTIVATED CHEMICAL VAPOR-DEPOSITION PROCESS .1. SPECTROSCOPIC INVESTIGATIONS
MEMMING, R
[J]. THIN SOLID FILMS, 1986, 143 (03) : 279 - 289