THE EFFECT OF HIGH CHARGE STATES ON THE STOPPING AND RANGES OF IONS IN SOLIDS

Recently, new types of ion sources have been developed which can deliver ions with extremely high charge states, for example Xe(q+) with q almost-equal-to 30 in ECR sources, and q almost-equal-to 44 in an EBIT source. Therefore, it becomes important to assess the influence of high charge states on the stopping and ranges, as well as on sputtering and damage production. In a first series of experiments, the ranges of 308 keV Xe(q+), q = 1-44, in SiO2 and Si were measured, and shall find their interpretation in the present theoretical treatment of nuclear and electronic stopping powers.