Various practical considerations are leading toward the use of protective dielectric slabs on the exterior surface of waveguide slot arrays. The presence of a dielectric substrate can alter the characteristics of the individual slots and considerably affect the mutual coupling. In order to analyze or design such an array, the performance of the elements has to be studied and analyzed carefully. In this paper, a method of analysis is presented based on previous work done by Elliott et al. on waveguide slots without the dielectric cover. Results are discussed extensively and are compared to other available theoretical and experimental data. Furthermore, a simple and accurate model is developed to account for the nonzero thickness of the waveguide walls. © 1990 IEEE