PRODUCTION OF ATOMIC NITROGEN ION-BEAMS

被引：10

作者：

WALTHER, SR ^{[1
]}

LEUNG, KN ^{[1
]}

KUNKEL, WB ^{[1
]}

机构：

[1] VARIAN EXTRION DIV,GLOUCESTER,MA 01930

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1990年 / 61卷 / 01期

关键词：

D O I：

10.1063/1.1141280

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A small multicusp ion source has been used to generate beams of nitrogen ions. To achieve a high percentage of N+ ions, the source was equipped with a magnetic filter and operated with a high N2 gas density. A nearly pure atomic nitrogen ion (N+) beam (98.5% N +, 1.5% N2+), suitable for implantation purposes, was produced. The operating characteristics of this source, including species mix, are presented.

引用

页码：315 / 317

页数：3

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