ON THE EQUIVALENT STRAIN AND DAMAGE DISTRIBUTIONS OF THIN SUBSURFACE LAYERS IN THE TRIPLE-CRYSTAL X-RAY-DIFFRACTOMETRY

At large deviations from the Bragg conditions the rocking curves obtained in triple‐crystal X‐ray diffractometry provide information on the structure of thin distorted subsurface layers. In the case of ultra‐thin distored layers containing only few diffraction planes the method was developed for restoring all the equivalent sets of distortion characteristics. In the present study this method is generalized and applied to the structural analysis of distortions in thicker layers with continuous characteristics. The study is carried out on the basis of analytic properties of the diffraction amplitude and the general problem of unambiguity in X‐ray diffraction is considered. Examples of equivalent continuous profiles are given. Copyright © 1990 WILEY‐VCH Verlag GmbH & Co. KGaA