KINETICS OF TITANIUM SILICIDE FORMATION ON SINGLE-CRYSTAL SI - EXPERIMENT AND MODELING

被引：42
作者：
PICO, CA
LAGALLY, MG
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1988年 / 64卷 / 10期
关键词：
D O I：
10.1063/1.342445
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：4957 / 4967
页数：11
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