PREPARATION OF QUATERNARY NITROGEN-CONTAINING PLASMA FILMS AND THEIR APPLICATION TO MOISTURE SENSORS

被引：13
作者：
INAGAKI, N
机构：
[1] Shizuoka Univ, Lab of Polymer, Chemistry, Hamamatsu, Jpn, Shizuoka Univ, Lab of Polymer Chemistry, Hamamatsu, Jpn
来源：
THIN SOLID FILMS | 1984年 / 118卷 / 02期
关键词：
D O I：
10.1016/0040-6090(84)90075-0
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
6
引用
收藏
页码：225 / 230
页数：6
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