COMPARATIVE OXIDATION STUDIES OF SIC(0001) AND SIC(0001) SURFACES

被引：78

作者：

MUEHLHOFF, L ^{[1
]}

BOZACK, MJ ^{[1
]}

CHOYKE, WJ ^{[1
]}

YATES, JT ^{[1
]}

机构：

[1] UNIV PITTSBURGH,CTR SURFACE SCI,DEPT CHEM,PITTSBURGH,PA 15260

来源：

JOURNAL OF APPLIED PHYSICS | 1986年 / 60卷 / 07期

关键词：

D O I：

10.1063/1.337121

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2558 / 2563

页数：6

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