THEORY OF CAPACITIVE PROBE METHOD FOR NONCONTACT CHARACTERIZATION OF DIELECTRIC-PROPERTIES OF MATERIALS

被引：3

作者：

TEWARY, VK

HEYLIGER, PR

CLARK, AV

机构：

[1] The Ohio State University, Columbus

[2] Department of Civil Engineering, The Colorado State University, Fort Collins

[3] Materials Reliability Division, National Institute of Standards and Technology, Boulder

来源：

JOURNAL OF MATERIALS RESEARCH | 1991年 / 6卷 / 03期

关键词：

D O I：

10.1557/JMR.1991.0629

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The capacitive probe method for noncontact characterization and monitoring of dielectric materials is analyzed theoretically. An analytical method based upon the Hilbert transform technique and a numerical method using the finite element technique for calculating the potential distribution and change in admittance of the probe caused by presence of the dielectric material as a function of liftoff (distance between the probe plane and the surface of the dielectric material) are described. The two methods are compared with each other and their relative advantages discussed. The possibility of extracting useful information about the dielectric constant of the material from experimental data is also discussed in the light of the proposed theory.

引用

页码：629 / 638

页数：10