OPTIMIZATION OF TOLANSKY TECHNIQUE FOR THIN FILM THICKNESS MEASUREMENTS

被引:0
|
作者
FLINT, PS
机构
关键词
D O I
暂无
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
引用
收藏
页码:C211 / &
相关论文
共 50 条
  • [11] THIN-FILM THICKNESS MEASUREMENTS WITH THERMAL WAVES
    ROSENCWAIG, A
    OPSAL, J
    WILLENBORG, DL
    APPLIED PHYSICS LETTERS, 1983, 43 (02) : 166 - 168
  • [12] COMMENT ON THICKNESS MEASUREMENTS OF SHARP THIN FILM STEPS
    BENNETT, JM
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1967, 38 (02): : 294 - &
  • [13] A CV TECHNIQUE FOR MEASURING THIN SOI FILM THICKNESS
    CHEN, J
    SOLOMON, R
    CHAN, TY
    KO, PK
    HU, CM
    IEEE ELECTRON DEVICE LETTERS, 1991, 12 (08) : 453 - 455
  • [14] Digital Moiré technique for thin film thickness measurement
    Su, Junhong
    Liu, Yichen
    Zhongguo Jiguang/Chinese Journal of Lasers, 2012, 39 (11):
  • [15] DETERMINATION OF THIN OXIDE FILM THICKNESS BY INTEGRATED INTENSITY MEASUREMENTS
    BORIE, B
    SPARKS, CJ
    ACTA CRYSTALLOGRAPHICA, 1961, 14 (06): : 569 - &
  • [16] Measurement of thin oil film thickness using ultrasonic technique
    Takeuchi, Akitoshi
    Terada, Seiichi
    Toda, So
    MODERN PHYSICS LETTERS B, 2008, 22 (11): : 1081 - 1085
  • [17] SOLAR CELL THICKNESS MONITORING TECHNIQUE FOR THIN FILM DEPOSITION
    HUDSON, WR
    REYNOLDS, TW
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1971, 42 (07): : 1090 - &
  • [18] Heterodyne interferometer for film thickness and refractive index measurements of optical thin-film
    Shimizu, N
    Yuguchi, J
    Takahashi, H
    INTERNATIONAL SYMPOSIUM ON POLARIZATION ANALYSIS AND APPLICATIONS TO DEVICE TECHNOLOGY, 1996, 2873 : 123 - 126
  • [19] A Review of Thin-film Thickness Measurements using Optical Methods
    Park, Jungjae
    Cho, Yong Jai
    Chegal, Won
    Lee, Joonyoung
    Jang, Yoon-Soo
    Jin, Jonghan
    INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING, 2024, 25 (08) : 1725 - 1737
  • [20] POSSIBILITIES AND LIMITATIONS OF STYLUS METHOD FOR THIN-FILM THICKNESS MEASUREMENTS
    ESCHBACH, HL
    VERHEYEN, F
    THIN SOLID FILMS, 1974, 21 (02) : 237 - 243