TRANSPORT OF PHOSPHORUS IN A LOW-PRESSURE HYDROGEN PLASMA

被引:8
作者
VEPREK, S [1 ]
OSWALD, HR [1 ]
机构
[1] UNIV ZURICH, INST INORG CHEM, RAMI STR 76, CH-8001 ZURICH, SWITZERLAND
来源
ZEITSCHRIFT FUR ANORGANISCHE UND ALLGEMEINE CHEMIE | 1975年 / 415卷 / 02期
关键词
D O I
10.1002/zaac.19754150213
中图分类号
O61 [无机化学];
学科分类号
070301 ; 081704 ;
摘要
引用
收藏
页码:190 / 192
页数:3
相关论文
共 11 条
[1]  
Arend H., 1968, KRISTALL TECHNIK, V3, P41
[2]  
Bonhoeffer KF, 1924, Z PHYS CHEM-STOCH VE, V113, P199
[3]  
ENGEL AV, 1965, IONIZED GASES
[4]   Effect of atomic hydrogen on inorganic compounds [J].
Kroepelin, H ;
Vogel, E .
ZEITSCHRIFT FUR ANORGANISCHE UND ALLGEMEINE CHEMIE, 1936, 229 (01) :1-15
[5]   CATALYZED SUBLIMATION OF RED PHOSPHORUS [J].
SCHAFER, H ;
TRENKEL, M .
ZEITSCHRIFT FUR ANORGANISCHE UND ALLGEMEINE CHEMIE, 1972, 391 (01) :11-&
[6]  
SOMORJAI GA, 1967, PROGR SOLID STATE CH, V4
[7]  
Veprek S., 1974, IEEE Transactions on Plasma Science, VPS-2, P25, DOI 10.1109/TPS.1974.4316801
[8]   PREPARATION OF THIN LAYERS OF GE AND SI BY CHEMICAL HYDROGEN PLASMA TRANSPORT [J].
VEPREK, S ;
MARECEK, V .
SOLID-STATE ELECTRONICS, 1968, 11 (07) :683-&
[10]  
VEPREK S, 1973, Z PHYS CHEM NEUE FOL, V86, P95