METALORGANIC CHEMICAL VAPOR-DEPOSITION OF III-V-SEMICONDUCTORS

被引：86
作者：
DUPUIS, RD
机构：
来源：
SCIENCE | 1984年 / 226卷 / 4675期
关键词：
D O I：
10.1126/science.226.4675.623
中图分类号：
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号：
07 ; 0710 ; 09 ;
摘要：
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页码：623 / 629
页数：7
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