THE INFLUENCE OF ION-IMPLANTATION ON THE THERMAL-OXIDATION OF COPPER

被引：13
作者：
RATCLIFFE, PJ
COLLINS, RA
机构：
来源：
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1983年 / 78卷 / 02期
关键词：
D O I：
10.1002/pssa.2210780221
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
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页码：547 / 553
页数：7
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