MODULAR SYSTEM FOR PRODUCTION OF THIN-FILMS BY CATHODE SPUTTERING

被引：0
|
作者：
PATZ, U [1 ]
机构：
[1] LEYBOLD HERAEUS HANAU,COLOGNE,FED REP GER
来源：
VIDE-SCIENCE TECHNIQUE ET APPLICATIONS | 1976年 / 31卷 / 185期
关键词：
D O I：
暂无
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
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页码：189 / 192
页数：4
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