MORPHOLOGY OF RF PLANAR MAGNETRON SPUTTERED LEAD ZIRCONATE TITANATE FILMS

被引：0
|
作者：
LIPELES, RA [1 ]
TUELING, MB [1 ]
LEUNG, MS [1 ]
机构：
[1] AEROSPACE CORP,EL SEGUNDO,CA 90245
来源：
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL | 1986年 / 33卷 / 06期
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D O I：
暂无
中图分类号：
O42 [声学];
学科分类号：
070206 ; 082403 ;
摘要：
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页码：820 / 820
页数：1
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