ON A QUANTITATIVE ESTIMATE OF THE REPRODUCIBILITY OF OPTICAL-THICKNESS IN THE DEPOSITION OF COATINGS

The reproducibility of the optical thickness in the deposition of coatings is defined as the confidence coefficient for a given confidence interval. It is shown that the reproducibility depends on the systematic and random errors of the technology process. The reproducibility of the optical thickness, determined by the systematic errors, amounts to 96-100% while that for random errors is 52-58%.