Copper (II) oxide thin film for methanol and ethanol sensing

被引：52

作者：

Parmar, Mitesh ^{[1
]}

Rajanna, K. ^{[1
]}

机构：

[1] Indian Inst Sci, Dept Instrumentat & Appl Phys, Bangalore 560012, Karnataka, India

来源：

INTERNATIONAL JOURNAL ON SMART SENSING AND INTELLIGENT SYSTEMS | 2011年 / 4卷 / 04期

关键词：

Copper (II) Oxide thin films; sputtering; gas sensing; response time and recovery time;

D O I：

10.21307/ijssis-2017-465

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A nanostructured copper (II) oxide film deposited by reactive DC-magnetron sputtering technique, has been studied for static sensor response towards methanol and ethanol by operating temperature and analyte concentration modulations. The optimum operating temperature (T-opt) for the sensing of methanol and ethanol is observed to be 350 degrees C and 400 degrees C, respectively. The maximum sensitivity observed for 2500 ppm methanol and ethanol is 29% and 15.4% respectively. Another important observation is that the sensitivity time reduces with analyte concentrations, where as recovery time increases. The response time of 2500 ppm methanol and ethanol is 235 s and 247 s correspondingly.

引用

页码：710 / 725

页数：16

共 25 条

[1] ATMOSPHERE SENSITIVE CUO/ZNO JUNCTIONS [J].