METALORGANIC CHEMICAL VAPOR-DEPOSITION

被引：141
作者：
DAPKUS, PD
机构：
来源：
ANNUAL REVIEW OF MATERIALS SCIENCE | 1982年 / 12卷
关键词：
D O I：
10.1146/annurev.ms.12.080182.001331
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：243 / 269
页数：27
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