REACTIVELY SPUTTERED TIXC THIN-FILMS - PREPARATION AND PROPERTIES

被引：0

作者：

EIZENBERG, M ^{[1
]}

MURARKA, SP ^{[1
]}

机构：

[1] BELL TEL LABS INC,MURRAY HILL,NJ 07974

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1983年 / 130卷 / 03期

关键词：

D O I：

暂无

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：C102 / C102

页数：1

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