DISTRIBUTION COEFFICIENTS OF GA, AS, AND P DURING GROWTH OF INGAASP LAYERS BY LIQUID-PHASE EPITAXY

被引:28
作者
ANTYPAS, GA [1 ]
EDGECUMBE, J [1 ]
机构
[1] VARIAN ASSOC,CORP SOLID STATE LAB,PALO ALTO,CA 94303
关键词
D O I
10.1016/0022-0248(76)90271-2
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
引用
收藏
页码:132 / 138
页数:7
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