GROWTH BY LIQUID-PHASE EPITAXY AND CHARACTERIZATION OF AL0.28GA0.72AS0.62P0.38

被引:3
作者
CHEN, CW
WU, MC
KUO, LK
机构
[1] Research Institute of Electrical Engineering, National Tsing Hua University, Hsinchu
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1992年 / 31卷 / 08期
关键词
ALGAASP; PHOTOLUMINESCENCE; VISIBLE SEMICONDUCTOR MATERIAL;
D O I
10.1143/JJAP.31.2514
中图分类号
O59 [应用物理学];
学科分类号
摘要
Al0.28Ga0.72As0.62P0.38 epitaxial layers were grown on GaAs0.61P0.39 substrates by liquid-phase epitaxy using a supercooling technique. The growth conditions and properties of the undoped AlGaAsP layers are described in detail. A fairly shiny surface and a flat AlGaAsP-GaAsP heterointerface was obtained in our study. The lattice mismatch normal to the wafer surface between the Al0.28Ga0.72As0.62P0.38 layer and GaAs0.61P0.39 substrate is approximately +0.27%. Low-electron-concentration undoped epitaxial layers can be grown from a Ga solution baked at a temperature of 900-degrees-C for 10 h or more and with a approximately 6-degrees-C supersaturation temperature. We obtained the lowest electron concentrations of 1 x 10(16) cm-3 measured by the capacitance-voltage method. By the photoluminescence measurements at various temperatures and excitation levels, the four recombination peaks observed are associated with the near-band-to-band, donor-to-valence-band, conduction-band-to-acceptor and donor-to-acceptor-pair transitions. The band gap of the Al0.28Ga0.72As0.62P0.38 is approximately 2.016 eV (6150 angstrom). The binding energy of the donor and acceptor is 14 and 36 meV, respectively.
引用
收藏
页码:2514 / 2518
页数:5
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