REFLECTOMETRY-AIDED SURFACE-LAYER INVESTIGATION

被引：2

作者：

JEZIERSKI, K

GUMIENNY, Z

MISIEWICZ, J

机构：

[1] Institute of Physics, Technical University, 50-370 Wrocław

来源：

APPLIED SURFACE SCIENCE | 1991年 / 50卷 / 1-4期

关键词：

D O I：

10.1016/0169-4332(91)90195-P

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

A new high-precision reflectometer for the visible and ultraviolet ranges was constructed. Normal incidence of light and computer support were applied. Experimental data for the surface microroughness analysis are presented. Knowledge of the reflectance in a given energy range in conjunction with the ellipsometric results for one energy point can provide the complete spectra of optical constants by means of a Kramers-Kronig analysis. A comparison between the calculated n and k spectra and the measured ones for GaAs is presented.

引用

页码：341 / 345

页数：5

共 10 条

[1] DIELECTRIC FUNCTIONS AND OPTICAL-PARAMETERS OF SI, GE, GAP, GAAS, GASB, INP, INAS, AND INSB FROM 1.5 TO 6.0 EV [J].