FABRICATION OF DRY-ETCHED CAVITY GAAS/ALGAAS MULTIQUANTUM-WELL LASERS WITH HIGH SPATIAL UNIFORMITY

被引：3
|
作者：
YAMADA, T
YUASA, T
ASAKAWA, K
SHIMAZU, M
ISHII, M
UCHIDA, M
机构：
[1] OPTOELECTR JOINT RES LAB,NAKAHARA KU,KAWASAKI 221,JAPAN
[2] NEC CORP,OPTOELECTR RES LABS,MIYAMAE KU,KAWASAKI,KANAGAWA 213,JAPAN
来源：
JOURNAL OF APPLIED PHYSICS | 1988年 / 64卷 / 05期
关键词：
D O I：
10.1063/1.341682
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：2286 / 2290
页数：5
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