PHYSICAL PROPERTIES OF THICK SPUTTER-DEPOSITED GLASS FILMS

被引：13
|
作者：
MATTOX, DM [1 ]
KOMINIAK, GJ [1 ]
机构：
[1] SANDIA LABS,DIV 5332,ALBUQUERQUE,NM 87115
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1973年 / 120卷 / 11期
关键词：
D O I：
10.1149/1.2403298
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：1535 / 1539
页数：5
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