PHYSICAL PROPERTIES OF THICK SPUTTER-DEPOSITED GLASS FILMS

被引：13

作者：

MATTOX, DM ^{[1
]}

KOMINIAK, GJ ^{[1
]}

机构：

[1] SANDIA LABS,DIV 5332,ALBUQUERQUE,NM 87115

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1973年 / 120卷 / 11期

关键词：

D O I：

10.1149/1.2403298

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

收藏

页码：1535 / 1539

页数：5

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