MECHANISM OF RF REACTIVE SPUTTERING

被引：126

作者：

SHINOKI, F

ITOH, A

机构：

来源：

关键词：

D O I：

10.1063/1.322242

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：3381 / 3384

页数：4

共 10 条

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[8]

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[9] SPECTROSCOPIC INVESTIGATION OF REACTIVE SPUTTERING OF ALUMINIUM [J].

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[10]

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