MOLECULAR-BEAM EPITAXIAL-GROWTH OF SMBA2CU3O7-DELTA THIN-FILMS AND EFFECT OF SUBSTRATE-TEMPERATURE ON THE SURFACE-ROUGHNESS

被引:6
作者
SCHINDLER, W [1 ]
VANHASSELT, P [1 ]
MARKL, J [1 ]
BAUER, P [1 ]
TONTSCH, P [1 ]
SAEMANNISCHENKO, G [1 ]
机构
[1] UNIV ERLANGEN NURNBERG,INST PHYS,D-91058 ERLANGEN,GERMANY
关键词
D O I
10.1016/0040-6090(94)90190-2
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Stoichiometrically optimized, epitaxial SmBa2Cu3O7-delta thin films with high T-c,T-R=0 and high critical current densities j(c) have been prepared for the first time in a tightly controlled molecular beam epitaxy process in non-reactive molecular oxygen, followed by an in situ loading process with molecular oxygen. The surface roughness (on a submicrometre scale) of single-crystal films with their c axes perpendicular to the surface depends markedly on the surface temperature of the substrate during the deposition of the epitaxial films, within a range of only a few degrees centigrade. The calibrated optimal temperature for the preparation of epitaxial films 200 nm thick of this single orientation is found to be 680 +/- 5 degrees C. In scanning tunnelling microscopy investigations, they show a surface roughness of less than 6 nm (five SmBa2Cu3O7-delta unit cells) on a 2 mu m x 2 mu m scale, At deposition temperatures below this optimal deposition temperature, the well-known a-axis growth increases rapidly, whereas higher temperatures give a significantly higher surface roughness, which can be observed by scanning electron microscopy.
引用
收藏
页码:232 / 237
页数:6
相关论文
共 20 条
[1]   FABRICATION OF HIGH-TC SUPERCONDUCTORS USING OZONE-ASSISTED MOLECULAR-BEAM EPITAXY [J].
ACHUTHARAMAN, VS ;
BEAUCHAMP, KM ;
CHANDRASEKHAR, N ;
SPALDING, GC ;
JOHNSON, BR ;
GOLDMAN, AM .
THIN SOLID FILMS, 1992, 216 (01) :14-20
[2]  
BAUDENBACHER F, 1991, P M2S HTSC KAN, V3
[3]   STABILITY LIMITS OF THE PEROVSKITE STRUCTURE IN THE Y-BA-CU-O SYSTEM [J].
BORMANN, R ;
NOLTING, J .
APPLIED PHYSICS LETTERS, 1989, 54 (21) :2148-2150
[4]   SCANNING TUNNELING MICROSCOPY OF SURFACE-PROPERTIES OF EPITAXIAL YBA2CU3O7-DELTA AND BI2SR2CA1CU2O8+DELTA HIGH-TC THIN-FILMS PREPARED BY DIFFERENT METHODS [J].
BURGER, J ;
BAUER, P ;
VEITH, M ;
SAEMANNISCHENKO, G .
ULTRAMICROSCOPY, 1992, 42 :721-727
[5]   SCREW DISLOCATIONS IN HIGH-TC FILMS [J].
GERBER, C ;
ANSELMETTI, D ;
BEDNORZ, JG ;
MANNHART, J ;
SCHLOM, DG .
NATURE, 1991, 350 (6316) :279-280
[6]  
GIERES W, 1992, COMMUNICATION
[7]   GROWTH-MECHANISM OF SPUTTERED FILMS OF YBA2CU3O7 STUDIED BY SCANNING TUNNELING MICROSCOPY [J].
HAWLEY, M ;
RAISTRICK, ID ;
BEERY, JG ;
HOULTON, RJ .
SCIENCE, 1991, 251 (5001) :1587-1589
[8]   OFF-AXIS LASER DEPOSITION OF YBA2CU3O7-DELTA THIN-FILMS [J].
HOLZAPFEL, B ;
ROAS, B ;
SCHULTZ, L ;
BAUER, P ;
SAEMANNISCHENKO, G .
APPLIED PHYSICS LETTERS, 1992, 61 (26) :3178-3180
[9]   ISLAND GROWTH AND SURFACE-TOPOGRAPHY OF EPITAXIAL Y-BA-CU-O THIN-FILMS ON MGO [J].
KREBS, HU ;
KRAUNS, C ;
YANG, XG ;
GEYER, U .
APPLIED PHYSICS LETTERS, 1991, 59 (17) :2180-2182
[10]   SCANNING TUNNELING MICROSCOPY STUDY OF DIFFERENT GROWTH-STAGES OF YBA2CU3O7-DELTA THIN-FILMS [J].
LANG, HP ;
HAEFKE, H ;
LEEMANN, G ;
GUNTHERODT, HJ .
PHYSICA C, 1992, 194 (1-2) :81-91