CHEMICAL VAPOR-DEPOSITION AND HOMOGENEOUS NUCLEATION IN FLUIDIZED-BED REACTORS - SILICON FROM SILANE

被引：46
|
作者：
LAI, S
DUDUKOVIC, MP
RAMACHANDRAN, PA
机构：
来源：
CHEMICAL ENGINEERING SCIENCE | 1986年 / 41卷 / 04期
关键词：
D O I：
10.1016/0009-2509(86)87140-8
中图分类号：
TQ [化学工业];
学科分类号：
0817 ;
摘要：
引用
收藏
页码：633 / 641
页数：9
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