COMPOSITE THIN-FILM CHARACTERIZATION BY ATOM PROBE FIELD-ION MICROSCOPY

被引：2
作者：
MELMED, AJ
CAMUS, PP
机构：
[1] CUSTOM PROBES UNLTD,GAITHERSBURG,MD 20878
[2] NATL INST STAND & TECHNOL,DIV SURFACE SCI,GAITHERSBURG,MD 20899
来源：
ULTRAMICROSCOPY | 1991年 / 35卷 / 3-4期
关键词：
D O I：
10.1016/0304-3991(91)90080-P
中图分类号：
TH742 [显微镜];
学科分类号：
摘要：
A wide range of composite thin films now can be studied routinely by atom probe field ion microscopy (APFIM). Two examples, analyses of Cr-Ni multilayer and co-deposited Fe3O4-Ag thin films, are discussed and illustrate some aspects of the complementarity of APFIM to other analytic techniques.
引用
收藏
页码：277 / 287
页数：11
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