COMPOSITE THIN-FILM CHARACTERIZATION BY ATOM PROBE FIELD-ION MICROSCOPY

被引：2

作者：

MELMED, AJ

CAMUS, PP

机构：

[1] CUSTOM PROBES UNLTD,GAITHERSBURG,MD 20878

[2] NATL INST STAND & TECHNOL,DIV SURFACE SCI,GAITHERSBURG,MD 20899

来源：

ULTRAMICROSCOPY | 1991年 / 35卷 / 3-4期

关键词：

D O I：

10.1016/0304-3991(91)90080-P

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

A wide range of composite thin films now can be studied routinely by atom probe field ion microscopy (APFIM). Two examples, analyses of Cr-Ni multilayer and co-deposited Fe3O4-Ag thin films, are discussed and illustrate some aspects of the complementarity of APFIM to other analytic techniques.

引用

页码：277 / 287

页数：11

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