EXCIMER LASER DEPOSITION OF SILICA FILMS - A COMPARISON BETWEEN 2 METHODS

被引:10
作者
LEON, B [1 ]
KLUMPP, A [1 ]
PEREZAMOR, M [1 ]
SIGMUND, H [1 ]
机构
[1] FRAUNHOFER INST FESTKORPERTECHNOL,W-8000 MUNICH 60,GERMANY
关键词
D O I
10.1016/0169-4332(90)90144-O
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Two different LCVD methods are compared, both using an ArF excimer laser in perpendicular configuration, but with different precursors: TEOS + O2 and SiH4 + N2O. The dependencies of the deposition rate on the substrate temperature, the total pressure and the laser energy density show that the process kinetics is completely different for both systems. In fact, the activation energy is much lower for the silane+nitrous oxide system than for TEOS + oxygen. Moreover, the TEOS + oxygen system leads to silica films with a higher water content and less spatial confinement. © 1990.
引用
收藏
页码:210 / 214
页数:5
相关论文
共 15 条
[1]  
Boudart M., 1981, KINETICS HETEROGENEO
[2]   LASER-INDUCED CHEMICAL VAPOR-DEPOSITION OF SIO2 [J].
BOYER, PK ;
ROCHE, GA ;
RITCHIE, WH ;
COLLINS, GJ .
APPLIED PHYSICS LETTERS, 1982, 40 (08) :716-719
[3]   GAS-PHASE VERSUS SURFACE CONTRIBUTIONS TO PHOTOLYTIC LASER CHEMICAL VAPOR-DEPOSITION RATES [J].
BRAICHOTTE, D ;
VANDENBERGH, H .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1988, 45 (04) :337-343
[4]  
Fuchs C., 1987, MATER RES SOC S P, V101, P361, DOI 10.1557/PROC-101-361
[5]  
GARRIDO C, 1989, THESIS U SANTIAGO CO
[6]  
GARRIDO C, 1989, ADV LASER SCI, V4, P439
[7]  
KLUMP AP, 1987, EMRS P, P507
[8]   PHOTOINDUCED TRANSFORMATION OF POLYSILOXANE LAYERS TO SIO2 [J].
KLUMPP, A ;
SIGMUND, H .
APPLIED SURFACE SCIENCE, 1989, 43 :301-303
[9]   DEPOSITION OF HIGH-QUALITY SIO2 LAYERS FROM TEOS BY EXCIMER LASER [J].
KLUMPP, A ;
SIGMUND, H .
APPLIED SURFACE SCIENCE, 1989, 36 (1-4) :141-149
[10]   LOW-TEMPERATURE GROWTH OF SILICON DIOXIDE FILMS - A STUDY OF CHEMICAL BONDING BY ELLIPSOMETRY AND INFRARED-SPECTROSCOPY [J].
LUCOVSKY, G ;
MANITINI, MJ ;
SRIVASTAVA, JK ;
IRENE, EA .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1987, 5 (02) :530-537