SUBMICROMETER STRIPES AND BUBBLES IN AMORPHOUS FILMS

被引:20
作者
CHAUDHARI, P [1 ]
HERD, SR [1 ]
机构
[1] IBM CORP THOMAS J WATSON RES CTR,YORKTOWN HEIGHTS,NY 10598
关键词
D O I
10.1147/rd.202.0102
中图分类号
TP3 [计算技术、计算机技术];
学科分类号
0812 ;
摘要
引用
收藏
页码:102 / 108
页数:7
相关论文
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