A COMPARISON BETWEEN MULTIPLE INTERACTION COMPUTER-SIMULATIONS AND THE LINEAR-THEORY OF SPUTTERING

被引：22

作者：

JAKAS, MM ^{[1
]}

HARRISON, DE ^{[1
]}

机构：

[1] USN,POSTGRAD SCH,MONTEREY,CA 93940

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1986年 / 14卷 / 4-6期

关键词：

D O I：

10.1016/0168-583X(86)90151-5

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：535 / 541

页数：7

共 16 条

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