ALIGNMENT ACCURACY OF FOCUSED ION-BEAM IMPLANTATION

被引：2
作者：
MORITA, T
ARIMOTO, H
MIYAUCHI, E
HASHIMOTO, H
机构：
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1987年 / 26卷 / 06期
关键词：
D O I：
10.1143/JJAP.26.955
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
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页码：955 / 958
页数：4
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