LASER-INDUCED DEPOSITION OF SILICON FILMS

被引：40
作者：
HANABUSA, M
MORIYAMA, S
KIKUCHI, H
机构：
来源：
THIN SOLID FILMS | 1983年 / 107卷 / 03期
关键词：
D O I：
10.1016/0040-6090(83)90401-7
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：227 / 234
页数：8
相关论文
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