Growth of Polycrystalline CaF2 via Low-Temperature Organometallic Chemical Vapor Deposition

被引：16

作者：

Benac, Michael J. ^{[1
]}

Cowley, Alan H. ^{[1
]}

Jones, Richard A. ^{[1
]}

Tasch, Al F., Jr. ^{[1
]}

机构：

[1] Univ Texas Austin, Dept Chem & Elect & Comp Engn, Austin, TX 78712 USA

来源：

CHEMISTRY OF MATERIALS | 1989年 / 1卷 / 03期

关键词：

D O I：

10.1021/cm00003a002

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：289 / 290

页数：3

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[6] EPITAXIAL-GROWTH AND CHARACTERIZATION OF CAF2 ON SI [J].

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