4-POINT SHEET RESISTANCE CORRECTION FACTORS FOR THIN RECTANGULAR SAMPLES

被引：64

作者：

PERLOFF, DS ^{[1
]}

机构：

[1] SIGNET CORP,RES & DEV LAB,SUNNYVALE,CA 94086

来源：

SOLID-STATE ELECTRONICS | 1977年 / 20卷 / 08期

关键词：

D O I：

10.1016/0038-1101(77)90044-2

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

收藏

页码：681 / 687

页数：7

相关论文

共 14 条

[1] ABRAMOWITZ M, 1964, NBS55 APPL MATH SER
[2] MEASUREMENT OF RESISTIVITY OF A THIN SQUARE SAMPLE WITH A SQUARE 4-PROBE ARRAY
BUEHLER, MG
THURBER, WR
[J]. SOLID-STATE ELECTRONICS, 1977, 20 (05) : 403 - 406
[3] PLANAR 4-PROBE TEST STRUCTURE FOR MEASURING BULK RESISTIVITY
BUEHLER, MG
THURBER, WR
[J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1976, 23 (08) : 968 - 974
[4] BUEHLER MG, 1976, NBS40022 SPEC PUBL
[5] 4-POINT PROBE HALL-EFFECT AND RESISTIVITY MEASUREMENTS UPON SEMICONDUCTORS
GREEN, MA
GUNN, MW
[J]. SOLID-STATE ELECTRONICS, 1972, 15 (05) : 577 - &
[6] MEASUREMENT OF THE SHEET RESISTIVITY OF A SQUARE WAFER WITH A SQUARE 4-POINT PROBE
KEYWELL, F
DOROSHESKI, G
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1960, 31 (08) : 833 - 837
[7] KOBER H, 1957, DICTIONARY CONFORMAL
[8] THE GEOMETRIC FACTOR IN SEMICONDUCTOR 4-PROBE RESISTIVITY MEASUREMENTS
MIRCEA, A
[J]. SOLID-STATE ELECTRONICS, 1963, 6 (05) : 459 - 462
[9] SEMICONDUCTOR SHEET RESISTIVITY MEASUREMENTS ON SQUARE SAMPLES
MIRCEA, A
[J]. JOURNAL OF SCIENTIFIC INSTRUMENTS, 1964, 41 (11): : 679 - &
[10] 4-POINT PROBE CORRECTION FACTORS FOR USE IN MEASURING LARGE DIAMETER DOPED SEMICONDUCTOR WAFERS
PERLOFF, DS
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1976, 123 (11) : 1745 - 1750