PHOTOENHANCED OXIDATION OF GALLIUM-ARSENIDE

被引:2
作者
BERMUDEZ, VM
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 1984年 / 2卷 / 02期
关键词
D O I
10.1116/1.572454
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:598 / 599
页数:2
相关论文
共 19 条
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