A SIMPLE METHOD FOR DETERMINING IMPURITY DISTRIBUTION NEAR A P-N JUNCTION

被引:2
作者
GRAY, PE
ADLER, RB
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D O I
10.1109/T-ED.1965.15529
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
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页码:475 / &
相关论文
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[2]  
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[3]  
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[4]   METHOD FOR MEASURING IMPURITY DISTRIBUTIONS IN SEMICONDUCTOR CRYSTALS [J].
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[5]   IMPURITY DISTRIBUTION IN EPITAXIAL SILICON FILMS [J].
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MANZ, RC .
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