ACCURACY OF PHASE-SHIFTING INTERFEROMETRY

被引：185
作者：
KINNSTAETTER, K
LOHMANN, AW
SCHWIDER, J
STREIBL, N
机构：
来源：
APPLIED OPTICS | 1988年 / 27卷 / 24期
关键词：
D O I：
10.1364/AO.27.005082
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
引用
收藏
页码：5082 / 5089
页数：8
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