DIELECTRIC-PROPERTIES OF PLASMA-POLYMERIZED TETRAFLUOROETHYLENE FILMS

被引：3
作者：
NAKANO, T [1 ]
FUKUYAMA, M [1 ]
OHKI, Y [1 ]
机构：
[1] WASEDA UNIV,DEPT ELECT ENGN,SHINJUKU KU,TOKYO 160,JAPAN
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1988年 / 27卷 / 06期
关键词：
D O I：
10.1143/JJAP.27.1042
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：1042 / 1046
页数：5
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