SYMPOSIUM ON ELECTRON BEAM PROCESSES FOR MICROELECTRONICS MALVERN JULY 1964

被引：2

|

作者：

BALMER, JR

BRUCE, JH

机构：

来源：

JOURNAL OF SCIENTIFIC INSTRUMENTS | 1964年 / 41卷 / 10期

关键词：

D O I：

10.1088/0950-7671/41/10/302

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

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页码：589 / &

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