Preparation and Investigation of Flexible SrTiO3/Ag/SrTiO3 Multilayer Transparent Conductive Thin Films

被引：0
|
作者：
Dong Qing-chen [1 ]
Ge Lei-jiao [2 ]
Sun Yong-tao [3 ]
Yu Shi-hui [4 ]
机构：
[1] Pingdingshan Ind Coll Technol, Sch Automat & Informat Engn, Pingdingshan 467000, Henan, Peoples R China
[2] Tianjin Univ, Sch Elect Informat & Engn, Tianjin 300072, Peoples R China
[3] Tianjin Univ, Dept Mech, Tianjin Key Lab Nonlinear Dynam & Control, Tianjin 300350, Peoples R China
[4] Tianjin Univ, Sch Microelect, Tianjin 300072, Peoples R China
来源：
ACTA PHOTONICA SINICA | 2018年 / 47卷 / 05期
基金：
中国国家自然科学基金;
关键词：
Thin films; Optical materials; Magnetron sputtering deposition; Transparent conductive films; Flexible;
D O I：
10.3788/gzxb20184705.0516003
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
In order to obtain high-performance flexible transparent conductive thin films, STO (30 nm)/Ag/STO (30 nm) multilayer thin films were prepared on PC substrates by magnetron sputtering. The influences of Ag mid-layer thickness on the structure, optical and electrical properties of the multilayer thin films were investigated. As the thickness of Ag mid-layer increases, the average transmittance in visible region firstly increases and then decreases, both the resistivity and sheet resistance decrease. For the multilayer thin films with 11 nm thick Ag mid-layer, it exhibits the maximum figure of merit of 14.23 X 10(-3) Omega(-1) with sheet resistance of 9.2 Omega/sq., and the average transmittance is similar to 82 % in the visible light region.
引用
收藏
页数：6
相关论文
共 28 条
  • [1] Band-gap energies of sol-gel-derived SrTiO3 thin films
    Bao, DH
    Yao, X
    Wakiya, N
    Shinozaki, K
    Mizutani, N
    [J]. APPLIED PHYSICS LETTERS, 2001, 79 (23) : 3767 - 3769
  • [2] BUSSMANN B K, 2012, MRS ONLINE P LIB ARC, V1474
  • [3] Optimization of Nb2O5/Ag/Nb2O5 multilayers as transparent composite electrode on flexible substrate with high figure of merit
    Dhar, Aritra
    Alford, T. L.
    [J]. JOURNAL OF APPLIED PHYSICS, 2012, 112 (10)
  • [4] Sol-gel derived Al and Ga co-doped ZnO thin films: An optoelectronic study
    Ebrahimifard, Reza
    Golobostanfard, Mohammad Reza
    Abdizadeh, Hossein
    [J]. APPLIED SURFACE SCIENCE, 2014, 290 : 252 - 259
  • [5] Ellmer K, 2012, NAT PHOTONICS, V6, P808, DOI [10.1038/nphoton.2012.282, 10.1038/NPHOTON.2012.282]
  • [6] Metal-insulator transition in a disordered and correlated SrT1-xRuxO3 system:: Changes in transport properties, optical spectra, and electronic structure -: art. no. 125104
    Kim, KW
    Lee, JS
    Noh, TW
    Lee, SR
    Char, K
    [J]. PHYSICAL REVIEW B, 2005, 71 (12)
  • [7] Annealing effect of ZnO/Au/ZnO transparent conductive films
    Lee, H. M.
    Lee, Y. J.
    Kim, I. S.
    Kang, M. S.
    Heo, S. B.
    Kim, Y. S.
    Kim, Daeil
    [J]. VACUUM, 2012, 86 (10) : 1494 - 1498
  • [8] Photochemical synthesis of ZnO/Ag2O heterostructures with enhanced ultraviolet and visible photocatalytic activity
    Ma, Shuaishuai
    Xue, Jinjuan
    Zhou, Yuming
    Zhang, Zewu
    [J]. JOURNAL OF MATERIALS CHEMISTRY A, 2014, 2 (20) : 7272 - 7280
  • [9] Present status of transparent conducting oxide ing oxide thin-film development for Indium-Tin-Oxide (ITO) substitutes
    Minami, Tadatsugu
    [J]. THIN SOLID FILMS, 2008, 516 (17) : 5822 - 5828
  • [10] Enhanced Performance of GaN-Based Green Light-Emitting Diodes with Gallium-Doped ZnO Transparent Conducting Oxide
    Oh, Min-Suk
    Seo, Inseok
    [J]. JOURNAL OF ELECTRONIC MATERIALS, 2014, 43 (04) : 1232 - 1236
123