SURFACE VS GAS-PHASE PROCESSES IN THE MOCVD OF GAAS

被引:0
|
作者
BALK, P
BRAUERS, A
机构
关键词
D O I
暂无
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
引用
收藏
页码:179 / 189
页数:11
相关论文
共 50 条
  • [21] ANALYSIS OF THE CONDITIONS OF CHEMICAL DEPOSITION OF SN FROM THE GAS-PHASE ONTO A GAAS SURFACE
    BARYBIN, AA
    GALEEVA, LK
    INORGANIC MATERIALS, 1978, 14 (07) : 955 - 958
  • [22] Density functional theory study of surface and gas phase processes occurring during the MOCVD of ZnS
    Cavallotti, C.
    Masi, M.
    Lovergine, N.
    Prete, P.
    Mancini, A.M.
    Carrà, S.
    Journal De Physique. IV : JP, 1999, 9 pt 1 (08): : 8 - 33
  • [23] A density functional theory study of surface and gas phase processes occurring during the MOCVD of ZnS
    Cavallotti, C
    Masi, M
    Lovergine, N
    Prete, P
    Mancini, AM
    Carrà, S
    JOURNAL DE PHYSIQUE IV, 1999, 9 (P8): : 33 - 40
  • [24] Quantum chemical study on gas-phase oligomerization in AlGaN MOCVD growth
    Tang, Liu
    Zuo, Ran
    Zhang, Hong
    Yuan, Yinmei
    COMPUTATIONAL AND THEORETICAL CHEMISTRY, 2019, 1166
  • [25] EQUILIBRIUM GAS-PHASE SPECIES FOR MOCVD OF ALXGA1-XAS
    TIRTOWIDJOJO, M
    POLLARD, R
    JOURNAL OF CRYSTAL GROWTH, 1986, 77 (1-3) : 200 - 209
  • [26] CFD simulation of pulsed MOCVD to reduce gas-phase parasitic reaction
    Zhou, N
    Lowry, S
    Krishnan, A
    MATERIALS RESEARCH IN LOW GRAVITY II, 1999, 3792 : 58 - 72
  • [27] MASS EXCHANGE DURING GAS-PHASE EPITAXY OF GAAS
    POPOV, VP
    RABINOVICH, VG
    INORGANIC MATERIALS, 1978, 14 (04) : 478 - 482
  • [28] ADSORPTION FROM THE GAS-PHASE - FUNDAMENTALS AND PROCESSES
    KAST, W
    CHEMIE INGENIEUR TECHNIK, 1981, 53 (03) : 160 - 172
  • [29] REACTOR DESIGN FOR CATALYTIC GAS-PHASE PROCESSES
    KEISKI, R
    VEIJOLA, V
    FINNISH CHEMICAL LETTERS, 1986, 13 (1-2): : 7 - 14
  • [30] Review of gas phase and surface reactions in AlN MOCVD
    He X.
    Liu R.
    Xue Y.
    Zuo R.
    Huagong Xuebao/CIESC Journal, 2023, 74 (07): : 2800 - 2813